Workshops > EFUG workshop

Workshop European FIB Users Group (EFUG)

The EFUG activities are currently coordinated by Frank Altmann (Fraunhofer, Halle), Guillaume Audoit (CEA, Grenoble), Hugo Bender (IMEC, Leuven), Hélène Chauvin (Thales, Toulouse).

The European Focused Ion Beam Users Group (EFUG) aims to stimulate the interaction and collaboration between Focused Ion Beam users by the exchange of information, the organization of meetings and the organization of FIB tutorials.

The EFUG includes members of industrial users, universities, various independent institutes and manufacturers.

Call for workshop presentations

Contributions for the FIB workshop are very welcome. They should be related to practical topics, new developments and application examples of semiconductor applications of FIB, including new instruments:

  • HIM, Plasma-FIB, Laser preparation tools,
  • Efficient preparation workflows : automated TEM preparation, Plasma-FIB, Laser, atom probe sample preparation,
  • Circuit edit : application procedures, new gas chemistries,
  • Process monitoring for wafer manufacturing, in-line FIB and wafer return,
  • Failure analysis case studies: Si devices, wide bandgap devices, solar cells.

Submit your presentation for the EFUG workshop 2017 to Guillaume Audoit, guillaume.audoit@cea.fr.

The workshop program will be available on September 11th at www.imec.be/efug/


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